COMPONENT QUANTITATIVE ANALYSIS METHOD WITH DEPTH OF CIGS THIN FILM UTILIZING LASER INDUCTION DECAY SPECTROMETRY

摘要

PROBLEM TO BE SOLVED: To provide a component quantitative analysis method with a depth of a CIGS thin film, which selects spectral lines whose characteristics are similar among spectral lines of specific elements, and utilizes a value obtained by adding those intensities.SOLUTION: A component quantitative analysis method with a depth of a CIGS thin film according to a first embodiment of this invention includes the steps of: irradiating a CIGS thin film with a laser beam to generate plasma, and obtaining a spectral line generated from the plasma; selecting spectral lines whose characteristics are similar among spectral lines of characteristic elements of the CIGS thin film; and measuring a component composition by utilizing a value obtained by adding the intensities of the selected spectral lines.