| 摘要 |
PROBLEM TO BE SOLVED: To save energy.SOLUTION: A thermal treatment apparatus 1 performs heat treatment on a plurality of workpieces 10 while continuously carrying the workpieces 10. The thermal treatment apparatus 1 comprises: a vacuum chamber 100 which has a first opening 112 for carrying in the workpieces 10 and a second opening 114 for carrying out the workpieces 10, and which keeps its inside in a vacuum atmosphere; an in-chamber carrying unit 700 which carries the workpieces 10 from the first opening 112 to the second opening 114 in the vacuum chamber 100; and a plurality of heating blocks 200 which are arranged in the vacuum chamber 100 along a carrying direction of the workpieces 10, and which are kept at a temporally fixed temperature so as to heat the workpieces 10. The workpieces 10 are heated when they pass by the plurality of heating blocks 200. |
