| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent a functional area from fragmenting when the functional area is parted from a brittle material substrate along a scribe line for contour.SOLUTION: A scribe line 51 for contour is formed on a surface of a brittle material substrate 17, and auxiliary scribe lines 52a-52d are formed outside the scribe line for contour. For parting, an underlay sheet 53 is inserted up to a position where the underlay sheet 53 is close to one auxiliary scribe line and the scribe line 51 for contour, and then moved in parallel with the surface of the brittle material substrate 17 to leave the auxiliary scribe line while pressing a periphery on a side where the sheet 53 is not inserted across the auxiliary scribe line 52a. Consequently, a product substrate can be parted from the brittle material substrate 17 without any damage.</p> |
