| 发明名称 |
EVAPORATOR AND THIN FILM DEPOSITION SYSTEM INCLUDING THE SAME |
| 摘要 |
The present invention relates to an evaporator and a thin film deposition system including the same. The evaporator according to an exemplary embodiment of the present invention includes a container including an evaporation space, a heater configured to heat the container, an inflow part configured to spray a liquid raw material into the evaporation space, and a rotor disposed in the evaporation space, the rotor configured to evaporate the liquid raw material. |
| 申请公布号 |
US2014338599(A1) |
申请公布日期 |
2014.11.20 |
| 申请号 |
US201314014982 |
申请日期 |
2013.08.30 |
| 申请人 |
Samsung Display Co., Ltd. |
发明人 |
KIM Hyun-Seok |
| 分类号 |
H01L51/56 |
主分类号 |
H01L51/56 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An evaporator comprising:
a container comprising an evaporation space; a heater configured to heat the container; an inflow part configured to spray a liquid raw material into the evaporation space; and a rotor disposed in the evaporation space, the rotor configured to evaporate the liquid raw material. |
| 地址 |
Yongin-city KR |
