| 摘要 |
This invention prevents problems due to substrate warpage. This inkjet head (1) is provided with the following: a pressure-chamber substrate (20) in which a pressure chamber (21) that contains ink is formed, said pressure chamber (21) being provided so as to connect to a nozzle (N) from which ink is discharged downwards; a spacer substrate (40) laminated to the top of a diaphragm (30) that is laminated to the top of the pressure-chamber substrate (20) and forms one side of the pressure chamber (21); a wiring substrate (50) laminated to the top of the spacer substrate (40); and an actuator (60) that is provided so as to contact the diaphragm (30) inside a space formed by the spacer substrate (40) between the wiring substrate (50) and the diaphragm (30) and is electrically connected to wiring (52) on the wiring substrate (50). The differences between the thermal-expansion coefficients of the pressure-chamber substrate (20), the diaphragm (30), the spacer substrate (40), and the wiring substrate (50) are all less than or equal to a prescribed value. |
