发明名称 |
PIEZOELECTRIC BASED MEMS STRUCTURE |
摘要 |
In one embodiment, a method of deforming a MEMS structure includes providing a base layer, providing a first piezoelectric slab operably connected to a surface of the base layer, determining a desired deformation of the base layer, applying a first potential to a first electrode operably connected to the first piezoelectric slab, applying a second potential to a second electrode operably connected to the first piezoelectric slab, and deforming the base layer with the first piezoelectric slab using the applied first potential and the applied second potential based upon the determined desired deformation. |
申请公布号 |
EP2803094(A1) |
申请公布日期 |
2014.11.19 |
申请号 |
EP20130706320 |
申请日期 |
2013.01.12 |
申请人 |
ROBERT BOSCH GMBH;CHEN, PO-JUI;FEYH, ANDO;O'BRIEN, GARY |
发明人 |
CHEN, PO-JUI;FEYH, ANDO;O'BRIEN, GARY |
分类号 |
H01L41/047;G01L1/16;H01L41/09;H01L41/113 |
主分类号 |
H01L41/047 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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