| 发明名称 |
POROUS COMPOSITE MEMBRANE INCLUDING MICROPOROUS MEMBRANE LAYERS AND NANOFIBER LAYER |
| 摘要 |
A filtration member comprising a nanofiber layer and two nanoporous membrane layers is disclosed. The filtration member can be used to remove particles and gels from photoresist and other fluids by a combination of sieving and non-sieving particle retention mechanisms. |
| 申请公布号 |
EP2707125(A4) |
申请公布日期 |
2014.11.19 |
| 申请号 |
EP20120781784 |
申请日期 |
2012.05.09 |
| 申请人 |
ENTEGRIS, INC. |
发明人 |
RAMIREZ, RAUL, A.;CHOI, WAI-MING |
| 分类号 |
B01D69/12;B01D39/14;B01D65/10;B01D69/02;B01D71/26;B01D71/56;G03F7/16 |
主分类号 |
B01D69/12 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
