| 摘要 |
PROBLEM TO BE SOLVED: To provide a carousel of a sputtering film-deposition apparatus hardly causing fluctuation of thickness and film quality of deposited thin films even when the carousel is of a large size; and to provide the sputtering film-deposition apparatus equipped therewith. SOLUTION: This carousel includes a holder 30 rotating around a rotary shaft of the carousel as the center. The holder includes an attachment part 32 and a holding member 33. The attachment part 32 has an opening part 31 and a flange part. Into the opening part 31, a member 4 to be film-deposited by sputtering is inserted. The flange part protrudes from the inner wall of the opening 31 toward the inside. The flange part abuts on the member 4 inserted in the opening part 31. The holding member 33 is inserted displaceably in the axial direction of the opening part 31. The holding member 33 rotates together with the holder 30, thereby pressing the member 4 toward radially outside against the flange part by centrifugal force. COPYRIGHT: (C)2013,JPO&INPIT |
