摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a liquefied carbon dioxide supply apparatus capable of pressurizing a liquefied carbon dioxide to prevent vaporization of the liquefied carbon dioxide. <P>SOLUTION: The apparatus includes: a liquefied carbon dioxide container (liquefied carbonic acid cylinder 8) for storing the liquefied carbon dioxide; an inert gas container (nitrogen gas cylinder 9) for storing inert gas (nitrogen gas); a liquefied carbon dioxide pressurized container 10 having a lower side inlet 10a for filling the liquefied carbon dioxide from the liquefied carbon dioxide container, from the lower side and an upper side inlet 10b for filling inert gas from the inert gas container, from the upper side; and a measuring pump 11 connected to the liquefied carbon dioxide pressurized container. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |