| 摘要 |
PROBLEM TO BE SOLVED: To provide an induction heating apparatus having high heating efficiency by suppressing reduction in the density of magnetic flux reaching a member to be inductively heated even when the distance between the member to be inductively heated and a magnetic pole is increased. SOLUTION: An induction heating apparatus includes: a susceptor 16 on which a wafer 60 is mounted; induction heating coils 36, 38 which form an AC magnetic flux parallel to the heated object mounting surface in the susceptor 16; and magnetic poles 32, 34 around which the induction coils 36, 38 are wound. In the magnetic poles 32, 34, the end surfaces opposite to the susceptor 16 are made to have a rectangular shape, and the width of the end surfaces is larger than the distance between the susceptor 16 and the magnetic poles 32, 34. COPYRIGHT: (C)2013,JPO&INPIT |
