发明名称 電極接合構造及びその製造方法
摘要 Disclosed is an electrode connection structure with which the strength of the connection between the electrodes can be increased and reliability can thereby be improved while the connection is made smaller. An electrode connection structure whereby conductive connection between electrodes is achieved includes: a first electrode (3); a second electrode (4) that is electrically connected with the first electrode (3); and a conductive connection member (5) that electrically connects the first and second electrodes (3), (4). In addition, there are provided carbon nanotubes (6) that are partially embedded in at least one of the first and second electrodes (3), (4) in such a way that part thereof projects from the surface. The projecting parts of the carbon nanotubes (6) are also embedded in the conductive connection member (5).
申请公布号 JP5625915(B2) 申请公布日期 2014.11.19
申请号 JP20100549418 申请日期 2010.01.13
申请人 发明人
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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