| 摘要 |
In a state in which two probes contact each electrode, the contact of the probes with each electrode is checked at the electrode (S100), and a short-circuit test between electrodes is conducted using each one probe from each of pairs of probes where contact has been confirmed (S110, S140). In this manner, since a short-circuit test between electrodes is conducted after it is confirmed that the probes contact each electrode, a short-circuit determination error caused by the fact that the probes are not in contact with each electrode is prevented, thereby improving the reliability of a test. |
