Tunable MEMS capacitor

摘要

A MEMS tunable capacitor comprises first and second opposing capacitor electrodes, wherein the second capacitor electrode is movable by a MEMS switch to vary the capacitor dielectric spacing, and thereby tune the capacitance. A tunable dielectric material and a non-tunable dielectric material are in series between the first and second electrodes. The tunable dielectric material occupies a dimension gd of the electrode spacing, and the non-tunable dielectric material occupies a dimension g of the electrode spacing. A third electrode faces the movable second electrode for electrically controlling tunable dielectric material. A controller is adapted to vary the capacitor dielectric spacing for a first continuous range of adjustment of the capacitance of the MEMS capacitor, and to tune the dielectric material for a second continuous range of adjustment of the capacitance of the MEMS capacitor, thereby to provide a continuous analogue range of adjustment including the first and second ranges. This arrangement provides independent control of the MEMS function and the dielectric tuning function, and enables a continuous adjustability.

主权项

1. A MEMS tunable capacitor comprising: first and second opposing capacitor electrodes, wherein the second capacitor electrode is movable by a MEMS switch to vary spacing between the first and second opposing capacitor electrodes the capacitor dielectric spacing, and thereby tune the capacitance; a third electrode facing the movable second electrode; and a tunable dielectric material and a non-tunable dielectric material in series between the second and third electrodes, wherein the tunable dielectric material occupies a first dimension of the spacing, and the non-tunable dielectric material occupies a second dimension of the spacing, the third electrode being configured and arranged to electrically control the tunable dielectric material, wherein the second capacitor electrode is configured and arranged to vary spacing in response to a first applied voltage for a first continuous range of adjustment of the capacitance of the MEMS capacitor and wherein the tunable dielectric material is configured and arranged to be tuned, via the third electrode, in response to a second applied voltage, for a second continuous range of adjustment of the capacitance of the MEMS capacitor, thereby to provide a continuous analogue range of adjustment including the first and second ranges.