发明名称 System method and apparatus for selecting and controlling light source bandwidth
摘要 The bandwidth selection mechanism includes a first actuator mounted on a second face of a dispersive optical element, the second face being opposite from a reflective face, the first actuator having a first end coupled to a first end block and a second end coupled to a second end block, the first actuator being operative to apply equal and opposite forces to the first end block and the second end block to bend the body of the dispersive optical element along the longitudinal axis of the body and in a first direction normal to the reflective face of the dispersive optical element. The bandwidth selection mechanism also includes a second actuator being operative to apply equal and opposite forces to bend the body along the longitudinal axis of the body, in a second direction perpendicular to the reflective face of the dispersive optical element.
申请公布号 USRE45249(E1) 申请公布日期 2014.11.18
申请号 US201313778006 申请日期 2013.02.26
申请人 Cymer, LLC 发明人 Figueroa Efrain;Partlo William N.;Algots John Martin
分类号 H01S3/10 主分类号 H01S3/10
代理机构 Martine Penilla Group, LLP 代理人 Martine Penilla Group, LLP
主权项 1. A bandwidth selection mechanism comprising: a dispersive optical element having a body including a reflective face of dispersion including an area of incidence extending in a longitudinal axis direction along the reflective face of the dispersive optical element; a first end block, disposed at a first longitudinal end of the body; a second end block, disposed at a second longitudinal end of the body, the second longitudinal end being opposite the first longitudinal end; a first actuator mounted on a second face of the dispersive optical element, the second face being opposite from the reflective face, the first actuator having a first end coupled to the first end block and a second end coupled to the second end block, the first actuator being operative to apply equal and opposite forces to the first end block and the second end block to bend the body along the longitudinal axis of the body and in a first direction normalperpendicular to the reflective face of the dispersive optical element; and a second actuator mounted on a third face of the dispersive optical element, the third face being normalperpendicular to the reflective face, the second actuator having a first end coupled to the first end block with a first flexture and a second end coupled to the second end block with a second flexture, the first actuator being operative to apply equal and opposite forces to the first end block and the second end block to bend the body along the longitudinal axis of the body, in a second direction perpendicular to the reflective face of the dispersive optical element, the second direction also being perpendicular to the first direction the second actuator including a pressurized fluid force application mechanism.
地址 San Diego CA US