| 摘要 |
PROBLEM TO BE SOLVED: To allow easy calculation of etching rate in a quartz etching step of a tuning fork type quartz vibrator.SOLUTION: In a method of manufacturing a tuning fork type quartz vibrator by a quartz etching process in a wet process, a plate thickness of a wafer dedicated for etching rate measurement is measured, a quartz etching is performed, and after a certain time has passed, the wafer dedicated for measurement is lifted up, plate thickness of the wafer dedicated for measurement is measured, and an etching rate in a plate thickness direction is calculated based on a change amount of plate thickness of the wafer dedicated for measurement and etching time, for determining quartz etching time. |
