发明名称 |
IMPRINT DEVICE AND IMPRINT METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide an imprint device etc. capable of stably supplying a cleaned resist to an ink jet head.SOLUTION: An imprint device 100 includes a discharge unit 50 which supplies a resist 2 stored in a main tank 4 to an ink jet head 30. In the imprint device 100, the resist 2 is cleaned by a filter 10a removing foreign objects therefrom and then flows while maintaining the cleanliness to be supplied to the ink jet head 30. |
申请公布号 |
JP2014216471(A) |
申请公布日期 |
2014.11.17 |
申请号 |
JP20130092465 |
申请日期 |
2013.04.25 |
申请人 |
DAINIPPON PRINTING CO LTD |
发明人 |
ARITSUKA YUKI;OKAWA YASUO |
分类号 |
H01L21/027;B29C59/02 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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