发明名称 IMPRINT DEVICE AND IMPRINT METHOD
摘要 PROBLEM TO BE SOLVED: To provide an imprint device etc. capable of stably supplying a cleaned resist to an ink jet head.SOLUTION: An imprint device 100 includes a discharge unit 50 which supplies a resist 2 stored in a main tank 4 to an ink jet head 30. In the imprint device 100, the resist 2 is cleaned by a filter 10a removing foreign objects therefrom and then flows while maintaining the cleanliness to be supplied to the ink jet head 30.
申请公布号 JP2014216471(A) 申请公布日期 2014.11.17
申请号 JP20130092465 申请日期 2013.04.25
申请人 DAINIPPON PRINTING CO LTD 发明人 ARITSUKA YUKI;OKAWA YASUO
分类号 H01L21/027;B29C59/02 主分类号 H01L21/027
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