| 发明名称 |
CATALYTIC CVD DEVICE, METHOD FOR FORMATION OF FILM, PROCESS FOR PRODUCTION OF SOLAR CELL, AND SUBSTRATE HOLDER |
| 摘要 |
In a catalytic CVD equipment 100, a holder 300 includes an antireflective structure for preventing reflection of a radiant ray that is ejected from the catalytic wire 11 toward the side of the substrate 200. |
| 申请公布号 |
KR101462321(B1) |
申请公布日期 |
2014.11.14 |
| 申请号 |
KR20127011213 |
申请日期 |
2010.10.01 |
| 申请人 |
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发明人 |
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| 分类号 |
C23C16/24;C23C16/44;H01L21/205 |
主分类号 |
C23C16/24 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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