| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a control element responding to a request for improving control stability of a charged particle beam, and a charged particle beam device using the same.SOLUTION: Control elements 6a to 6c of an embodiment comprise a cylinder 7 including a through hole P through which a charged particle beam E passes, a metalized layer 8 deposited on an inner peripheral surface S1 of the cylinder 7, and an electrode 10 including one principal surface S2 bonded onto the metalized layer 8 via a brazing filler material 9. The metalized layer 8 includes a junction region 11 arranged in a junction part between itself and the electrode 10 and a neighboring region 12 arranged near the junction part, thereby making it possible to reduce the thermal stress applied to the junction part between the metalized layer 8 and the electrode 10. This reduction further makes it possible to suppress peeling of the electrode 10 from the cylinder 7 and to improve control stability of the charged particle beam E.</p> |
