MASKING PATTERN FOR INERTIAL SENSOR AND INERTIAL SENSOR WHICH IS MANUFACTURED USING THE SAME

摘要

A mask pattern for an inertia sensor according to the present invention includes: a membrane layer pattern having a connecting pattern to connect a frame pattern and a mass member pattern; and a mass member layer pattern having a frame pattern to form a frame and a mass member pattern to form a mass member, wherein the membrane layer pattern has a width and an area smaller than those of the mass member pattern.