| 摘要 |
<p>The present invention relates to a valve assembly and, more particularly, to a valve assembly for adjusting a flow and a substrate processing apparatus including the same. The substrate processing apparatus according to an embodiment of the present invention comprises a process chamber having a processing space inside and an exhaust module for exhausting the inside of the process chamber. The exhaust module comprises an exhaust line and a valve assembly. The exhaust line includes a first line connected to the process chamber and a second line connected to a vacuum pump for generating a vacuum pressure. The valve assembly connects the first line to the second line and adjusts the vacuum pressure provided to the exhaust line. The valve assembly comprises: a valve housing having a space inside; a first port disposed on one side of the valve housing and including the first passage connected to the first line; a second port disposed on one side of the valve housing and including a second passage connected to the second line; a blocking plate disposed inside the valve housing; a driving unit which transfers the blocking plate to a blocking position for blocking the first passage and to an open position for opening the first passage; a sealing member provided to the blocking plate or the first port to seal a gap between the blocking plate and the first port; and a shock absorbing member provided to the blocking plate or the first port to absorb a shock of the sealing member when the first passage is blocked.</p> |
