METAL NANOPARTICLE MATERIAL, JOINT MATERIAL CONTAINING THE SAME, AND SEMICONDUCTOR DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a joint material capable of forming a joint layer having high joint strength at low temperature (e.g. 400°C or less).SOLUTION: It is found that a joint layer having a high joint strength at low temperature (e.g. 400°C or less) by using a metal nanoparticle material containing copper nanoparticles and nickel oxide nanoparticles at a predetermined ratio. More specifically, there is provided a metal nanoparticle material containing the copper nanoparticles of 99.995 to 97 mass% and the nickel oxide nanoparticles of 0.005 to 3 mass% based on the total metal nanoparticles. There are also provided metal nanoparticles consisting of the metal nanoparticles having diameters in a range of 1 to 1,000 nm, of 99% or more in number, based on the number of the total metal particles.