IMPRINT DEVICE AND MANUFACTURING METHOD OF GOODS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an imprint device which is advantageous in the efficiency improvement achieved when the occurrence of an unfilled portion in a resin pattern is inhibited.SOLUTION: An imprint device 1 imprints a pattern formed at a mold 8 on a substrate 11. The imprint device 1 includes: a substrate holding part 5 which holds the substrate 11 and moves in a direction along a surface of the substrate 11; a gas supply part 4 for supplying a gas 12 into a space between a pattern part 8a of the mold 8 and the substrate 11; and a wall part 13 which is disposed so as to enclose the space 15 to which the gas 12 is supplied. In a position where the substrate 11 faces the mold 8, the wall part 13a faces the substrate holding part 5 or the substrate 11 through a gap.