INSPECTION SYSTEM, INSPECTION IMAGE DATA GENERATION METHOD

摘要

PROBLEM TO BE SOLVED: To improve inspection accuracy of an inspection system using a TDI sensor.SOLUTION: An inspection system includes: a primary optical system 1 configured to irradiate either of charged particles or an electromagnetic wave as a beam; a movable unit which can hold an inspection target and moves the inspection target in a predetermined direction through a position where the beam is irradiated by the primary optical system; a TDI sensor configured to integrate an amount of secondary charged particles obtained by irradiating the beam onto the inspection target while moving the movable unit in the predetermined direction by a time delay integration method along a predetermined direction to sequentially transfer the result as an integrated detection amount; and a prevention unit configured to prevent an arrival of the beam at the target side or an arrival of the secondary charged particles at the TDI sensor during a time period from one transfer to the following transfer after the elapse of a predetermined length of time from the one transfer and until the following transfer.