RADIO FREQUENCY POWER SOURCE HAVING PRECISE POWER DETECTOR

摘要

A radio frequency (RF) power source having a precise power detector includes a RF signal generator, a RF power amplifying circuit, a power supply circuit, and a precise power detector. The precise power detector includes a voltage mutual inductor, a current mutual inductor, a precise detecting module, and a microcontroller integrated with an analog-digital (A/D) converter and a micro-processing unit, wherein the voltage mutual inductor and the current mutual inductor are respectively connected with the precise detecting module. The precise detecting module includes an add circuit, a subtraction circuit, a rectification circuit, and a filtering-amplifying circuit, wherein the add circuit and the subtraction circuit are respectively connected with the rectification circuit, the rectification circuit connects to the filtering-amplifying circuit, the filtering-amplifying circuit connects to the microcontroller integrated with the A/D converter and the micro-processing unit.

主权项

1. A RF power supply with a precise power detector comprises a RF signal generator, a RF power amplifying circuit, power supplying lines, and a precise power detector, wherein the precise power detector comprises a voltage mutual inductor, a current mutual inductor, a precise detecting module and a microcontroller integrated with an analog-digital converter and a micro-processing unit, wherein the voltage mutual inductor and the current mutual inductor are respectively connected to the precise detector module, the precise detecting module comprises an add circuit, a subtraction circuit, a rectification circuit and a filtering-amplifying circuit, wherein the adding circuit performs an addition on the signals from the voltage mutual inductor and the current mutual inductor, and the subtraction circuit performs a subtraction on the signals from the voltage mutual inductor and the current mutual inductor, the add circuit and the subtraction circuit are respectively connected to the rectification circuit, the rectification circuit is connected to the filtering-amplifying circuit, the filtering-amplifying circuit is connected to the microcontroller.