PROCESS FOR MANUFACTURING SELF-ASSEMBLED BLOCK COPOLYMER FILMS

摘要

Process for manufacturing self-assembled block copolymer films, having two or more blocks, comprising the following steps: A. having a substrate; B. distributing a first solution containing at least one block copolymer onto the substrate so as to at least partially coat a surface of the substrate, obtaining a first intermediate product; C. making a step of self-assembling said at least one block copolymer by heating the first intermediate product; the process being characterised in that the self-assembling step C is made through a first RTP process of Rapid Thermal Processing comprising the following substeps: C. l heating the first intermediate product up to a first target temperature, ranging from a glass transition temperature Tg of said at least one block copolymer to an order- disorder transition temperature TODT of said at least one block copolymer, through a first temperature rising ramp having a first rate of temperature change not lower than 5°C/second; C.2 maintaining the first intermediate product at said first target temperature for a first time interval not longer than 60 minutes, whereby a sample is obtained on the surface of which a self-assembled film of said at least one block copolymer has been made; C.3 cooling the sample down to the ambient temperature through a first temperature descending ramp. Optionally, before step B, a step of neutralisation of said surface of said substrate through random copolymers is made through a second RTP process of Rapid Thermal Processing.