OPTICAL ELEMENT, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

摘要

An optical element is provided with: a substrate; a multilayer film disposed on the substrate and formed by stacking a plurality of unit laminated structures each having a first layer and a second layer disposed on the first layer; and a plurality of spacer layers respectively disposed in different interlayer positions from each other among interlayer positions between the unit laminated structures.