发明名称 圧電特性計測システムおよび圧電特性計測方法
摘要 <P>PROBLEM TO BE SOLVED: To provide a piezoelectric characteristic instrumentation system and method capable of accurately obtaining piezoelectric characteristic even with respect to a dynamic load, and also capable of coping with temperature characteristic measurement. <P>SOLUTION: A piezoelectric characteristic instrumentation system 1 includes: a piezoelectric characteristic measurement device 10 that periodically applies pressure on a piezoelectric body S being a measurement object and measures output voltage; a calculation unit 2 calculates a piezoelectric characteristic value of the piezoelectric body S based on information on the measured output voltage and the applied pressure. The piezoelectric characteristic measurement device 10 includes a loading measurement unit having a loading surface on which the piezoelectric body S is loaded, an actuator 12 that applies pressure on the piezoelectric body S, and an information acquisition unit 3 that acquires information on the applied pressure and information on the output voltage of the piezoelectric body. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP5623868(B2) 申请公布日期 2014.11.12
申请号 JP20100244862 申请日期 2010.10.30
申请人 发明人
分类号 G01L1/16;G01L25/00;G01R29/22;H01L41/08;H01L41/09;H01L41/18;H01L41/22 主分类号 G01L1/16
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