发明名称 Method of forming a high electron mobility semiconductor device
摘要 In an embodiment, a semiconductor device is formed by a method that includes, providing a base substrate of a first semiconductor material, and forming a layer that is one of SiC or a III-V series material on the base substrate. In a different embodiment, the base substrate may be one of silicon, porous silicon, or porous silicon with nucleation sites formed thereon, or silicon in a (111) plane.
申请公布号 EP2779212(A3) 申请公布日期 2014.11.12
申请号 EP20140159907 申请日期 2014.03.14
申请人 SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC 发明人 SALIH, ALI;PARSEY, JR, JOHN
分类号 H01L21/18;H01L21/02 主分类号 H01L21/18
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