Pattern matching method and pattern matching apparatus

摘要

Provided is a template matching method and a template matching apparatus, where the degree of matching between a template and the actual image upon template matching is maintained at a high level, without depending on a partial appearance of a lower layer. Proposed as one embodiment, is a method and an apparatus for template matching, where either an area is set in which comparison of the template and the image is not conducted, or a second area is set inside the template where comparison different from comparison conducted in a first comparison area is to be conducted, and the template matching is conducted on the basis either of comparison excluding the non-comparison area, or of comparison using the first and second areas.

主权项

1. A pattern matching method for performing pattern matching on a search-target image of a sample by using a template, comprising the steps of:
defining in the template an excluding area where a first comparison between the template and the image is excluded, or a first comparison area and a second comparison area where a second comparison different from the first comparison is performed, in accordance with a status of the search-target image for each location where the template is positioned while matching is performed using the template so that an edge of a pattern in the template is excluded from the excluding area or the first comparison area; and executing template matching based on comparison processing excluding the excluding area or comparison processing in the first and second comparison areas.