发明名称 CRACK FREE SEPARATION METHOD FOR THE ELECTRODEPOSITED THIN FILM AND EVALUATING METHOD OF THE PHYSICAL PROPERTIES FOR THE FILM
摘要 <p>The present invention, as a thin film separating method, is a non-crack separating method of an Electrolysis Deposition film including a step of preparing a flexible substrate for thin film separation; a step of depositing a thin film on the substrate with an electrolysis deposition method; a step of pouring resin on the deposited thin film; and a step of separating the solidified resin and the deposited thin film from the flexible substrate. The present invention has a simple and easy separation process by using the flexible substrate, as compared to a method of separation from an inflexible substrate. And as a physical characteristic about an electrolysis deposition film separated without a crack is evaluated, the physical characteristic is able to be evaluated without a damage problem occurring in the separation process so that a high reliable evaluation result is obtained. And as the thin film on the flexible substrate is able to be separated without a crack, there are excellent effects in terms of shape and quality.</p>
申请公布号 KR101460236(B1) 申请公布日期 2014.11.10
申请号 KR20130056133 申请日期 2013.05.20
申请人 INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY ERICA CAMPUS 发明人 YOO, BONG YOUNG;PARK, KI MOON;KIM, DONG UK
分类号 H01L21/20;H01L21/288;H01L21/66 主分类号 H01L21/20
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