发明名称 OXIDE THIN FILM TRANSISTOR AND METHOD OF FABRICATING THE SAME
摘要 <p>An oxide thin film transistor and a method for manufacturing the same according to the present invention include, in an oxide thin film transistor using an amorphous ZnO based semiconductor as an active layer, securing a tunneling diode with a source/drain electrode by forming a thin insulating layer of metal oxide on the active layer. Thereby, damage to the active layer due to the patterning of the source/drain electrode can be prevented, and processes can be simplified at the same time.</p>
申请公布号 KR20140129818(A) 申请公布日期 2014.11.07
申请号 KR20130048612 申请日期 2013.04.30
申请人 LG DISPLAY CO., LTD. 发明人 BAE, JONG UK
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
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