发明名称 CYCLIC COMPOUND, METHOD FOR PRODUCING THE SAME, RADIATION-SENSITIVE COMPOSITION, AND RESIST PATTERN FORMATION METHOD
摘要 A cyclic compound of the present invention has a molecular weight of 500 to 5000, and is represented by the following formula (1):;
申请公布号 US2014329178(A1) 申请公布日期 2014.11.06
申请号 US201214359081 申请日期 2012.11.14
申请人 MITSUBISHI GAS CHEMICAL COMPANY, INC. 发明人 Echigo Masatoshi;Yamakawa Masako
分类号 G03F7/027;C07C67/14;C07C69/54 主分类号 G03F7/027
代理机构 代理人
主权项 1. A cyclic compound having a molecular weight of 500 to 5000 and represented by the formula (1):wherein R0 are each independently a hydrogen atom, a hydroxyl group, a cyano group, a nitro group, a substituted or non-substituted heterocyclic group, a halogen atom, a substituted or non-substituted linear aliphatic hydrocarbon group having 1 to 20 carbon atoms, a substituted or non-substituted branched aliphatic hydrocarbon group having 3 to 20 carbon atoms, a substituted or non-substituted cyclic aliphatic hydrocarbon group having 3 to 20 carbon atoms, a substituted or non-substituted aryl group having 6 to 20 carbon atoms, a substituted or non-substituted aralkyl group having 7 to 30 carbon atoms, a substituted or non-substituted alkoxy group having 1 to 20 carbon atoms, a substituted or non-substituted amino group having 0 to 20 carbon atoms, a substituted or non-substituted alkenyl group having 2 to 20 carbon atoms, a substituted or non-substituted acyl group having 1 to 20 carbon atoms, a substituted or non-substituted alkoxycarbonyl group having 2 to 20 carbon atoms, a substituted or non-substituted alkyloyloxy group having 1 to 20 carbon atoms, a substituted or non-substituted aryloyloxy group having 7 to 30 carbon atoms, a substituted or non-substituted alkylsilyl group having 1 to 20 carbon atoms, or a group in which each of the groups is bonded to a bivalent group (one or more groups selected from the group consisting of a substituted or non-substituted alkylene group, a substituted or non-substituted allylene group, and an ether group); and at least one of R0 is a monovalent group containing a (meth)acryloyl group.
地址 Tokyo JP