PHOSPHORUS-DOPED ZINC OXIDE AND PRODUCTION METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a columnar crystal of zinc oxide doped with phosphorus in a desired concentration, preferably in the form of a densified film, and a very simple and inexpensive method of producing the crystal.SOLUTION: A phosphorus-doped zinc oxide comprises a columnar zinc oxide crystal doped with phosphorus in a concentration of 0.01 at% or higher. The phosphorus-doped zinc oxide can be produced by a method including a step of preparing a raw material aqueous solution which contains a zinc source consisting of zinc ion and at least one phosphorus source selected from phosphate ion, hydrogenphosphate ion, dihydrogenphosphate ion and phosphoric acid and has a pH of higher than 11.0 and a step of immersing a substrate in the raw material aqueous solution to precipitate columnar crystals of the phosphorus-doped zinc oxide on the substrate.