MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF METAL-CERAMICS PLATE LAMINATE, MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF SUBSTRATE FOR POWER MODULE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing apparatus and a manufacturing method of a metal-ceramics plate laminate capable of manufacturing a laminate of a ceramics plate, a bonding material and a metal plate efficiently, by preventing positional deviation thereof when bonding the metal plate and ceramics plate via a bonding material layer, and to provide a manufacturing apparatus and a manufacturing method of a substrate for a power module applying the same to a substrate for a power module.SOLUTION: A manufacturing apparatus of a metal plate-ceramics plate laminate by laminating a metal plate, on which a temporary fixing material is formed, on a ceramics plate on which a bonding material layer is formed comprises: conveyance means 3 for conveying a metal plate 30 on a ceramic plate 21 and laminating the ceramic plate 21 and metal plate 30; and heating means 4 provided in the way of the conveyance path of the metal plate 30 by the conveyance means 3, and melting the temporary fixing material of the metal plate 30.