发明名称 DEVICE FOR IMPROVING THE UNIFORMITY OF THE FILM FOR PACKAGING AND METHOD FOR APPLYING THE SAME
摘要 A device and a method for improving uniformity of a film, which uses the controllable magnets instead of permanent magnets and controlling the magnetic polarity by a programmable control device, so that when the clamping frame is aligned with the mask, the magnetic polarity of the electromagnet is controlled to generate an alternating magnetic field which will affect the coating material sprayed from the evaporation source. With the help of the alternating magnetic field, the coating material will be evenly sprayed to a substrate. Consequently, uniformity of the film for coating and the yield of products are improved.
申请公布号 US2014329032(A1) 申请公布日期 2014.11.06
申请号 US201414267526 申请日期 2014.05.01
申请人 EverDisplay Optronics (Shanghai) Limited 发明人 LI ChiaChen;HUANG TeinWang
分类号 C23C16/52;C23C16/04 主分类号 C23C16/52
代理机构 代理人
主权项 1. A device for improving uniformity of a film, comprising: an evaporation source to emit ions; and a clamping frame spaced apart from the evaporation source to generate a controllable magnetic field so as to evenly distribute ions emitted from the evaporation source.
地址 Shanghai CN