Source for Selectively Providing Positively or Negatively Charged Particles for a Focusing Column

摘要

A single column charged particle source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the source to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis.

主权项

1. A charged particle beam system, comprising:
a charged particle source for selectively providing positively or negatively charged particles; a biasing electrode for biasing the charged particle source to an operating voltage; a power source capable of providing a positive or negative voltage to the biasing electrode, wherein the power source is capable of switching polarity to selectively extract positively or negatively charged particles from the charged particle source; an extractor electrode for extracting charged particles from the charged particle source; an extractor electrode power source capable of providing a positive or negative voltage to the extractor electrode; and a focusing column for focusing the charged particles extracted from the charged particle source onto a work piece, wherein the focusing column is a single column and focuses the positively or negatively charged particles onto the work piece.