发明名称 SCALE
摘要 <p>PROBLEM TO BE SOLVED: To provide a scale which can be formed with a protection member without damaging the function of a phase grating.SOLUTION: A scale 100 includes: a phase grating 2; a cover glass 3; and an adhesion part 11. The phase grating 2 is formed on one surface of a substrate 1. The cover glass 3 is arranged on the phase grating 2. The adhesion part 11 is disposed on one surface of the substrate 1 in the periphery of the phase grating 2 with glass beads 13 having predetermined diameters included therein, and configured to adhere the substrate 1 and the cover glass 3.</p>
申请公布号 JP2014209060(A) 申请公布日期 2014.11.06
申请号 JP20130085761 申请日期 2013.04.16
申请人 MITSUTOYO CORP 发明人 OSAKI MOTOHIRO;HAYASHI KENICHI
分类号 G01D5/347;G02B5/18 主分类号 G01D5/347
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