TEMPERATURE CONTROL APPARATUS AND FACILITY FOR MANUFACTURING SEMICONDUCTOR DEVICE HAVING THE SAME

摘要

Disclosed are a temperature adjusting device and a semiconductor manufacturing facility having the same. The temperature adjusting device comprises: a plate; a heater block which is arranged inside or under the plate; a power supply unit which is arranged outside a chamber to provide power to the heater block; a contactless relay which is connected between the power supply unit and the heater block and adjusts the power; and a relay monitoring unit which detects overheating of the contactless relay and blocks the power when the overheating is detected.