COST-EFFECTIVE SINGLE CRYSTAL MULTI-STAKE ACTUATOR AND METHOD OF MANUFACTURE

摘要

This invention pertains to piezoelectric actuators made of single crystal active elements which not only exhibit uniform and superior displacement in the axial direction but also of lower cost to produce than full single crystal ring or tube actuators. Said multi-stake actuator is made up of multiple longitudinal (d33) or transverse (d3i or d32) mode piezoelectric single crystal active elements, bonded together by epoxy with the aid of shaped edge- and top and bottom washer-stiffeners which are configured to suit various application needs.