发明名称 |
METHOD OF SURFACE TENSION CONTROL TO REDUCE TRAPPED GAS BUBBLES |
摘要 |
The embodiments disclose a method of surface tension control to reduce trapped gas bubbles in an imprint including modifying chemistry aspects of interfacial surfaces of an imprint template and a substrate to modify surface tensions, differentiating the interfacial surface tensions to control interfacial flow rates of a pre-cured liquid resist and controlling pre-cured liquid resist interfacial flow rates to reduce trapping gas and prevent trapped gas bubble defects in cured imprinted resist. |
申请公布号 |
KR20140127842(A) |
申请公布日期 |
2014.11.04 |
申请号 |
KR20147024429 |
申请日期 |
2013.01.25 |
申请人 |
SEAGATE TECHNOLOGY LLC |
发明人 |
PARK, SANG MIN;KURATAKA NOBUO;GAUZNER GENNADY |
分类号 |
B29C59/02;B29C33/56 |
主分类号 |
B29C59/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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