发明名称 Method for producing curable composition for imprints
摘要 Provided is a method of producing a curable composition for imprints including (A) a polymerizable monomer, (B) a polymerization initiator, and (C) a solvent which is capable of effectively suppressing lifting or separation of patterns, excellent in coatability, and excellent in time-dependent stability. The method of producing a curable composition for imprints comprises preparing one species of liquid (D) which contains at least either one of the polymerizable monomer (A) and the polymerization initiator (B), passing the liquid (D) through a filter, and then adding the solvent (C).
申请公布号 US8877828(B2) 申请公布日期 2014.11.04
申请号 US201213371088 申请日期 2012.02.10
申请人 FUJIFILM Corporation 发明人 Enomoto Yuichiro;Kodama Kunihiko;Tarutani Shinji
分类号 C08F2/46;C08F20/18;G03F7/00;B82Y10/00;G03F7/16;B82Y40/00 主分类号 C08F2/46
代理机构 Sughrue Mion, PLLC 代理人 Sughrue Mion, PLLC
主权项 1. A method of producing a curable composition for imprints which includes (A) a polymerizable monomer, (B) a polymerization initiator, and (C) a solvent, comprising preparing one species of liquid (D) which contains either the polymerizable monomer (A) or both of the polymerizable monomer (A) and the polymerization initiator (B), passing the liquid (D) through a filter, and then adding the solvent (C); or comprising preparing two or more species of liquid (D) each of which contains either the polymerizable monomer (A) or both of the polymerizable monomer (A) and the polymerization initiator (B), passing each of the liquids (D) through a filter, and then mixing the liquids (D) together with the solvent (C).
地址 Tokyo JP