发明名称 Electromechanical transducer and method of manufacturing the same
摘要 Disclosed is an electromechanical transducer, including: a cell including a substrate, a vibration film, and a supporting portion of the vibration film configured to support the vibration film so that a gap is formed between the substrate and the vibration film; and a lead wire that is placed on the substrate with an insulator interposed therebetween and extends to the cell, wherein the insulator has a thickness greater than the thickness of the supporting portion. The electromechanical transducer can reduce parasitic capacitance to prevent an increase in noise, a reduction in bandwidth, and a reduction in sensitivity.
申请公布号 US8875583(B2) 申请公布日期 2014.11.04
申请号 US201213425346 申请日期 2012.03.20
申请人 Canon Kabushiki Kaisha 发明人 Torashima Kazutoshi;Kato Ayako
分类号 G01L11/00;G01L9/12;G01R27/26;H04R19/00;B06B1/02 主分类号 G01L11/00
代理机构 Fitzpatrick, Cella, Harper & Scinto 代理人 Fitzpatrick, Cella, Harper & Scinto
主权项 1. An electromechanical transducer, comprising: a substrate; a vibration film; a supporting portion of the vibration film configured to support the vibration film so that a gap is formed between the substrate and the vibration film; an insulator on the substrate; and a lead wire which is placed on the insulator and which extends to the vibration film, wherein the insulator has a thickness greater than the thickness of the supporting portion.
地址 Tokyo JP