发明名称 |
Electromechanical transducer and method of manufacturing the same |
摘要 |
Disclosed is an electromechanical transducer, including: a cell including a substrate, a vibration film, and a supporting portion of the vibration film configured to support the vibration film so that a gap is formed between the substrate and the vibration film; and a lead wire that is placed on the substrate with an insulator interposed therebetween and extends to the cell, wherein the insulator has a thickness greater than the thickness of the supporting portion. The electromechanical transducer can reduce parasitic capacitance to prevent an increase in noise, a reduction in bandwidth, and a reduction in sensitivity. |
申请公布号 |
US8875583(B2) |
申请公布日期 |
2014.11.04 |
申请号 |
US201213425346 |
申请日期 |
2012.03.20 |
申请人 |
Canon Kabushiki Kaisha |
发明人 |
Torashima Kazutoshi;Kato Ayako |
分类号 |
G01L11/00;G01L9/12;G01R27/26;H04R19/00;B06B1/02 |
主分类号 |
G01L11/00 |
代理机构 |
Fitzpatrick, Cella, Harper & Scinto |
代理人 |
Fitzpatrick, Cella, Harper & Scinto |
主权项 |
1. An electromechanical transducer, comprising:
a substrate; a vibration film; a supporting portion of the vibration film configured to support the vibration film so that a gap is formed between the substrate and the vibration film; an insulator on the substrate; and a lead wire which is placed on the insulator and which extends to the vibration film, wherein the insulator has a thickness greater than the thickness of the supporting portion. |
地址 |
Tokyo JP |