INTERCEPTING APPARATUS AND TRANSFERRING APPARATUS HAVING THE SAME FOR SUBSTRATE

摘要

The present invention relates to an intercepting device which includes: a seal belt for preventing that foreign matters generated from a driving device mounted on a substrate transferring apparatus move to the outside of the substrate transferring apparatus; and a support unit for supporting the seal belt, wherein the seal belt is located between one end and the other end of the support unit to be supported by the support unit and the support unit has a contact member with which the seal bet comes into contact, and a substrate transferring apparatus having the intercepting device. The intercepting device and the substrate transferring apparatus according to the present invention can enhance interception effects of foreign matters because the seal belt is accurately located at an open part of the substrate transferring apparatus and enhance the quality of a substrate because the substrate is manufactured sanitarily.