CATHODE OF ION BEAM SOURCE

摘要

A cathode of an ion beam source is formed on the upper surface of a body of the ion beam source, and includes a first cathode and a second cathode arranged to be separated from each other in a certain distance to form an opening for discharge an ion beam. At least one among the first cathode and the second cathode includes a cathode body part supported by the bode and including a flow path for circulating a coolant inside and a replaceable part formed on the cathode body part and periodically replaced to uniformly maintain distance in case of the distance being changed by repeated discharge of the ion beam. Therefore, only the replaceable part can be rapidly replaced though the cathode is damaged by the discharged ion beam.