METHOD FOR FORMING TRANSPARENT ELECTRODE AND THE TRANSPARENT ELECTRODE, LIGHT-EMITTING DIODE AND OPTICAL DEVICE INCLUDING IT

摘要

The present invention provides a method for forming a metal layer capable of performing a layer-by-layer growth at a thin thickness and forming a transparent electrode by successively stacking a contact layer, a metal layer, and a metal oxide layer on a support substrate or an optical device. According to the present invention, the transparent electrode of high performance, low surface resistance, and high light transmission is formed without additional process installation and steps by the connection of an Ag thin film between domains at a thin thickness by an addictive (dopant) like Mg and Ti. Thereby, an optical device with high performance is manufactured.