发明名称 PHOTOSENSITIVE COMPOSITION HAVING GOOD LIGHT ABSORBANCE AND SUITABLE FOR FORMING FINE PATTERN
摘要 <p>The present invention relates to a photosensitive composition with enhanced light absorptivity suitable for forming fine patterns and, more specifically, to a photosensitive composition used for forming a hardened part in order to perform desired patterns by an integrated exposure method which exposes through an UV lamp and a photo mask, or by a direct writing method which uses light of the UV lamp or short wavelength laser light, and for developing an unhardened part using an alkali solution. Desirably, the present invention relates to the photosensitive composition and a hardened material therefrom having absorbance of 1.2-1.8 for a dried film with thickness of 25μm in the wavelength of 355-375 nm before exposure, and absorbance of 0.6 in the wavelength of 405 nm, and to a dried film which is obtained by drying after coating a carrier film with the composition.</p>
申请公布号 KR101456133(B1) 申请公布日期 2014.11.03
申请号 KR20120122814 申请日期 2012.11.01
申请人 发明人
分类号 G03F7/028;G03F7/11;G03F7/26;H01L21/027 主分类号 G03F7/028
代理机构 代理人
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