CONDITIONING TOOLS AND TECHNIQUES FOR CHEMICAL MECHANICAL PLANARIZATION

摘要

TOOLS FOR CONDITIONING CHEMICAL MECHANICAL PLANARIZATION (CMP) PADS COMPRISE A SUBSTRATE WITH ABRASIVE PARTICLES COUPLED TO AT LEAST ONE SUFACE. THE TOOLS CAN HAVE VARIOUS PARTICLE AND BOND CONFIGURATIONS. FOR INSTANCE, ABRASIVE PARTICLES MAY BE BONDED (E.G., BRAZED OR OTHER METAL BOND TECHNIQUE) TO ONE SIDE, OR TO FRONT AND BACK SIDES. ALTERNATIVELY, ABRASIVE PARTICLES ARE BONDED TO A FRONT SIDE, AND FILLER PARTICLES COUPLED TO A BACK SIDE. THE ABRASIVE PARTICLES CAN FORM A PATTERN (E.G., HEXAGONAL) AND HAVE PARTICLE SIZES THAT ARE SUFFICIENTLY SMALL TO PENETRATE PORES OF A CMP PAD DURING CONDITIONING, LEADING TO FEWER DEFECTS ON WAFERS POLISHED WITH THE CONDITIONED CMP PAD. GRAIN BONDING CAN BE ACCOMPLISHED USING BRAZING FILMS, ALTHOUGH OTHER METAL BONDS MAY BE USED AS WELL. ALSO, BALANCED BOND MATERIAL (E.G., BRAZE ON BOTH SIDES) ALLOWS FOR LOW OUT-OF- FLATNESS VALUE.