主权项 |
1. A linear conveyor, comprising:
a linear motor stator which includes a plurality of electromagnets arranged along a predetermined conveyance path, and in which each section of said predetermined conveyance path is individually controlled for conduction; a plurality of conveyance carriages each including a linear motor mover which is a permanent magnet and constitutes a linear motor in tandem with a linear motor stator, the conveyance carriages being movably disposed along the conveyance path; a linear scale which includes scale members secured to each of the conveyance carriages, and detectors disposed along the conveyance path so that the scale members are detected; a plurality of motor controllers which are disposed in correspondence with the sections of the linear motor stator respectively, and individually control conduction of the electromagnets for each section based on the results of detecting the scale member by the detector; and a data storage unit which stores position correction data for each conveyance carriage, which is data for correcting movement error unique to each conveyance carriage and is determined based on the movement error of each conveyance carriage measured in advance using a predetermined measurement jig, wherein each of the plurality of motor controllers determines, as control data, either the position correction data stored in the data storage unit or processed data obtained through processing using the position correction data, and controls the conduction of the electromagnets using the control data, so as to stop each conveyance carriage at a target stopping point. |