METHYL BENZENE SENSORS USING CR-DOPED NICKEL OXIDE NANO-STRUCTURES AND FABRICATION METHOD THEREOF

摘要

Provided in the present invention are a gas sensor including a gas sensitive layer composed of chrome (Cr)-doped nickel oxide (NiO) in order to be selectively sensitive to methylbenzene gas, and a manufacturing method thereof. The gas sensor is composed of a gas sensitive layer which comprises Cr-doped NiO. The gas sensor has very excellent selectivity to methylbenzene gas compared with other gases. The gas sensor can be easily manufactured in quantity by the manufacturing method, and is not influenced by a microstructure of a material forming the gas sensitive layer. The suggested gas sensor can have very small sensitivity to benzene, formaldehyde, and alcohol and can have very high selectivity and sensitivity to methylbenzene gas such as xylene and toluene, by doping Cr in a NiO sensitive material with a structure advantageous to gas dispersion and reaction.