发明名称 APPARATUS FOR ACHIEVING SUSTAINED ANISOTROPIC CRYSTAL GROWTH ON THE SURFACE OF A SILICON MELT
摘要 <p>An apparatus for growing a crystalline sheet from a melt includes a cold block assembly. The cold block assembly may include a cold block and a shield surrounding the cold block and being at an elevated temperature with respect to that of the cold block, the shield defining an opening disposed along a surface of the cold block proximate a melt surface that defines a cold area comprising a width along a first direction of the cold block, the cold area operable to provide localized cooling of a region of the melt surface proximate the cold block. The apparatus may further include a crystal puller arranged to draw a crystalline seed in a direction perpendicular to the first direction when the cold block assembly is disposed proximate the melt surface.</p>
申请公布号 KR20140126383(A) 申请公布日期 2014.10.30
申请号 KR20147025886 申请日期 2012.12.12
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 MACKINTOSH BRIAN H.;KELLERMAN PETER L.;SUN DAWEI
分类号 C30B11/00;C30B15/00;C30B15/06;C30B15/14;C30B29/06 主分类号 C30B11/00
代理机构 代理人
主权项
地址