发明名称 |
APPARATUS FOR ACHIEVING SUSTAINED ANISOTROPIC CRYSTAL GROWTH ON THE SURFACE OF A SILICON MELT |
摘要 |
<p>An apparatus for growing a crystalline sheet from a melt includes a cold block assembly. The cold block assembly may include a cold block and a shield surrounding the cold block and being at an elevated temperature with respect to that of the cold block, the shield defining an opening disposed along a surface of the cold block proximate a melt surface that defines a cold area comprising a width along a first direction of the cold block, the cold area operable to provide localized cooling of a region of the melt surface proximate the cold block. The apparatus may further include a crystal puller arranged to draw a crystalline seed in a direction perpendicular to the first direction when the cold block assembly is disposed proximate the melt surface.</p> |
申请公布号 |
KR20140126383(A) |
申请公布日期 |
2014.10.30 |
申请号 |
KR20147025886 |
申请日期 |
2012.12.12 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
MACKINTOSH BRIAN H.;KELLERMAN PETER L.;SUN DAWEI |
分类号 |
C30B11/00;C30B15/00;C30B15/06;C30B15/14;C30B29/06 |
主分类号 |
C30B11/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|